摘要
介绍了应用于激光共聚焦生物芯片扫描仪中的光机二维扫描技术 ,即用振镜和f- θ扫描物镜构成其中一维的光扫描系统 ,用步进电机驱动扫描工作台移动构成另一维机械扫描系统 ,并在此基础上分析研究了光机二维扫描控制系统的设计。为快速、高精度激光共聚焦生物芯片扫描仪的研制作了新的有益尝试 。
The optical and mechanical two-dimension scanning technology applied in the laser confocal biochip scanner is described firstly in this paper, one dimensional scanning is completed by the optical scanning system composed of galvanometer and f-θ objective lens, another is done by the mechanical scanning system moving the work stage by the stepping motor. And on the base of the above discussion, the design of the control system of the two dimensional scanning is analyzed. The new and helpful experiments about the laser confocal biochip scanner which has high scanning speed and precision have been done, and some preliminary experimental results are achieved.
出处
《光学仪器》
2003年第4期30-34,共5页
Optical Instruments
