低压反应离子镀的物理过程

Physical process of reactive low voltage ion plating

通过观察和分析 ,指出低压反应离子镀中材料经过了蒸发、电离、飞行、加速和沉积五个阶段 ,定性解释了对能谱和质谱的测量结果 ,比较全面、细致地描绘了低压反应离子镀的物理图像。

The particles of starting material experience evaporation, ionization, flight, acceleration and deposition in the process of reactive low voltage ion plating are presented. This idea can better understand the experiment results about mass and energy spectrum of ion species.