摘要
介绍了光谱辐射标准及计量测试光束线实验站上使用的 ,在 0 .6 m段达到四个量级的真空差分而设计的差分系统。该系统在光束线和实验站运行时 ,要求在有限的长度范围内既要保证四个量级的真空差分效果又要让同步辐射光能顺利通过。文中详细介绍了该差分系统的理论计算、结构、实验结果与理论值的比较。讨论了引起理论值与实测值差异的几种原因。
A 0.6m long differential pumping system used in the spectral radiation standard and metered beam line is described. The most challenging problem of designing is to guarantee four orders of pressure differential at two ends of the system and the SR going through at the same time. The measured and calculated data are compared in detail.
出处
《真空》
CAS
北大核心
2003年第4期48-49,共2页
Vacuum