磨粒尺寸对FAP研抛工件亚表面损伤层深度的影响

Effect of Grit Size on the Sub-surface Damage of Work-piece Lapped by FAP

建模分析了固结磨料研抛过程中结构因素与工艺参数对磨粒切入工件深度的影响;采用BOE分步腐蚀法测量了不同磨料粒径FAP研抛后K9玻璃、熔石英玻璃亚表面损伤层深度;建立了亚表面损伤层深度与磨粒粒径之间的相关关系。结果表明:固结磨料研抛条件下,工件亚表面裂纹层深度与工件特性、研抛垫特性及磨粒尺寸相关;基于平均切深的亚表面损伤层模型与实验结果有较好的吻合度。为固结磨料研抛垫的设计与工艺参数的制订提供了理论依据。

A model describing the indentation depth of abrasive grain into work-piece was developed,based on the FAP parameters and lapping ones. A method named BOE step-by-step etching was adopted to measure the sub-surface damage layer depth of K9 glass and fused silica glass lapped by FAP which is embedded with different size of abrasives. The relationship between the subsurface damage layer depth and the abrasive grain size was established. Results show that the sub-surface damage layer depth is a function of work-piece characteristics,pad properties and abrasive size. The developed model based on the average indentation depth agrees with the experimental facts. The above work can be used to guide the design of FAP and processing parameters.