超声喷雾热解法制备CeO_2薄膜及性能研究

Characteristics of CeO_2 Thin Films Prepared by Ultrasonic Spray Pyrolysis Method

以硝酸铈(Ce(NO_3)_3·6H_2O)水溶液为前驱溶液,采用自制超声喷雾热解装置在石英衬底上沉积制备CeO_2薄膜,并通过X射线衍射(XRD)、扫描电镜(SEM)、紫外可见分光光度计等分析薄膜晶体结构、微观形貌及光学特性。结果表明,随着沉积温度升高,薄膜择优生长取向逐渐变为(200);当沉积温度为500℃时,薄膜具有良好的致密性;薄膜在可见光区表现出近85%的高透过率,同时发现随着沉积温度升高,薄膜透过率逐渐增大,光吸收逐渐由缺陷吸收转变为本征吸收。

CeO_2 thin films were grown on the quartz substrate by the ultrasonic spray pyrolysis method using cerous nitrate solutions as the precursor material. The X-ray diffraction( XRD),scanning electron microscopy( SEM) and ultra violet-visible spectrophotometer were employed to analyze the crystalline,microstructure and optical property of the films. It is shown that the films exhibit the preferred growth orientation( 200) gradually with the substrate temperature increasing. The films have the good compactness in the case of substrate temperature 500 ℃. The films have the high transmittance of near85% in the visible region. As the substrate temperature increases,the optical transmittance increases gradually,and the light absorption changes from defect absorption to intrinsic absorption gradually.