迈克尔逊干涉型加速度地震检波器集成芯片

Integrated Optical Chips in a Michelson Interference Acceleration Seismic Geophone

提出了一种新型的迈克尔逊干涉型混合集成光学加速度地震检波器。以尺寸为38mm×6mm×2mm的X切Y传LiNbO3晶体为基底,详细分析并设计了迈克尔逊干涉芯片的双Y分支波导、相位调制器和偏振器。对成功制作的迈克尔逊干涉芯片进行了通光测试,并对检测器进行了测试。结果表明,检波器及芯片性能良好,振动与检波器输出信号吻合良好。该检波器系统的主要设计参数为:自然频率3549Hz,相位检测灵敏度ΔΦ/a为1.1×10-2rad/m/s2,工作频带0～1065Hz。

Kind of hybrid-integrated optical acceleration seismic geophone based on Michelson interferometry was presented. On the LiNbO3 substrate with the dimension of 38 mm × 6 mm × 2 mm, double-Y branching guide, phase modulator and polarizers were integrated to constitute the Michelson interference chip. The main design parameters of the geophone system were given.