电子诱导脱附研究钨表面O_2对N_2的置换吸附

Study of Displacement Adsorption of N_2 by O_2 on Surface of Polycrysta lline Wvia Threshold Energy of Electron-stimulated Desorption

实验测量了室温高真空条件下,多晶W表面O2和N2的电子诱导脱附(ESD)阈值能量.O2-W吸附对的ESD能量约为15.5eV,N2-W吸附对的ESD能量约为13.8eV.实验结果具有良好的可重复性.利用ESD阈值能量研究了多晶W表面O2对N2的置换吸附过程,表明在一定的时间间隔内,O2可以置换吸附在多晶W表面的N2,且该过程不可逆.对实验结果进行了分析.

The threshold energies of electron-stimulated desorption of N-2 and O-2 from polycrystalline W in vacuum (1x10(-3) Pa) at T=300 K are measured. For O-2-W couple, the threshold energy is about 15.5 eV; For N-2-W couple, the threshold energy is about 13.8 eV. The displacement adsorption of N-2 by O-2 from the surface of polycrystalline W is studied using the measured threshold energy. The result shows that within a given time interval, N-2 could be displaced by O-2 on the surface of W, but the opposite process could not occur.