用光刻工艺制作高密度基因芯片的研究

Research of Fabricating High-density Genechip by Photolithography Technology

利用集成电路中的光刻工艺,以玻璃为衬底,制作了高密度基因芯片,它能将数以万计 的寡核苷酸固定于固相支持物,且具有高通量、并行性、微型化及自动化等特点.

Genechip is a hot new biotechnique developed rapidly in recent years. Genechip adopt photolithography technology of microelectronic technology in IC to fabricate high - desity genechip about glass substrate, it can bind thousands of oligonucleotide probe with surface of solid support. Genechip possesses the features of high - throughout, parallel, minimization and automation.