真空热预处理在平板摄像管CdSe多层靶面制作中的作用

Effect of Vacuum Heat Pre-treatment on Properties of CdSe Multilayer Target Used for FPC

为了研制用于真空微电子平板摄像管(FPC)的具有高感光度的CdSe多层光导材料,发展了包括真空热预处理(VHPT)和非真空热后处理(NAHT)在内的新型热处理工艺。重新装配的蒸发设备和具有结晶和氧化功能的新型炉具满足两种热处理工艺并同其他工艺一起可制造出新的高性能的CdSe多层光导靶。实验结果表明,CdSe多层光导靶的灵敏度提高,而清晰度(分辨率)保持不变,介绍了与VHPT工艺有关的实验结果。

In order to develop a multilayer photoconductive material based on CdSe with high light sensiti vity for use in vacuum microelectronics flat panel camera tube (FPC), a novel heat treatment techno logy consisting of both vacuum heat pretreatment (VHPT) and nonvacuum heat aftertreating (NHAT) has been developed, a reinstalled multisources thermal evaporated equipment and a new furnace with both crystallization and oxidation function has been restandardized. The developments in these two respects, along with other technologies, bring about a new multilayer CdSe photoconductive target with remarkable performance. A more dramatic result appeared: the sensitivity of our multila yer CdSe photoconductive target has been increased by two orders of magnitudes while its resolution has been kept constant. This paper mainly focus on reporting the achievement and experiment results related to VHPT technology.