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阵列式碳纳米管制备研究

Research and preparation of aligned carbon nanotubes
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摘要 CVD工艺制备碳纳米管阵列,二甲苯(C6H4(CH3)2)作为碳源气体,二茂铁(C10H10Fe)作为催化剂前驱体,反应温度为700~800℃,碳纳米管直径30~60nm,长度50~60μm。 Large arrays of self-oriented multiwall carbon nanotubes with dia meter of30~60nm and length of50~60ìm are grown on quartz glass.Xylen e is used as carbon source and ferrocene is used as precursor of catalyst.The r eactive temperature is between700~800℃.
出处 《微纳电子技术》 CAS 2003年第9期19-21,共3页 Micronanoelectronic Technology
关键词 阵列式碳纳米管 制备研究 CVD工艺 二甲苯 二茂铁 aligned carbon nanot ubes carbon nanotubes CVD process
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参考文献8

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