摘要
CVD工艺制备碳纳米管阵列,二甲苯(C6H4(CH3)2)作为碳源气体,二茂铁(C10H10Fe)作为催化剂前驱体,反应温度为700~800℃,碳纳米管直径30~60nm,长度50~60μm。
Large arrays of self-oriented multiwall carbon nanotubes with dia meter of30~60nm and length of50~60ìm are grown on quartz glass.Xylen e is used as carbon source and ferrocene is used as precursor of catalyst.The r eactive temperature is between700~800℃.
出处
《微纳电子技术》
CAS
2003年第9期19-21,共3页
Micronanoelectronic Technology