AT切石英晶体频率力敏特性的实验研究

Experiment Research of AT-cut Quartz Crystal Resonator Force-Frequency Characteristic

研究了石英晶体谐振器的力敏特征及晶体的活力与晶片的外形结构、电极尺寸、激励电平、振动模式的关系。实验表明,沿厚度方向剪切振动的AT切石英晶体谐振器的频率力敏特性与激励电平及电极大小无关,泛音振动下的频率力敏特性的增加与泛音次数的增加不成严格的倍数关系,晶体的活力与晶体外形、谐振频率及受力无关。

The relations of quartz resonator forcesensor characteristic with crystal vigor,the appearance structure of crystal piece,electrode size,drive voltage and vibration model have been researched.Experiment results shown,there is not any relation of forcefrequency characteristic of ATcut quartz resonator shearing vibration in the thickness direction with drive voltage,and electrode large or small not strict multiple relation of overtone vibration forcesensor characteristic increment with overtone times increment,not any relation of quartz activity with itself shape,vibration frequency and acted force on it.