摘要
根据压电微泵的结构及其功能可将其划分成6个功能块或子系统:压电片子系统、泵腔、入口阀子系统、出口阀子系统、入口通道子系统和出口通道子系统.对6个子系统建立终端特性模型,并进行有关终端特性分析.最后,将压电微泵子系统的终端特性模型进行了组合,得到整个系统的特性模型.对此进行分析,可以方便地获得压电微泵的性能特性.
Piezoelectric micropump is divided into six functional blocks (or subsystems):the bimorph subsystem,the chamber,the inlet valve subsystem,the outlet valve subsystem,the inlet pipe subsystem and the outlet pipe subsystem. The models of the terminal behavior of the six subsystems were established,then the terminal behavior of the subsystems were analyzed. After these, the models were connected together as the model of the whole system. The behavior of the whole system can be obtained by analyzing the model.
出处
《工程设计学报》
CSCD
2003年第4期179-182,共4页
Chinese Journal of Engineering Design
基金
国家自然科学基金资助项目(50105020).
关键词
压电微泵
终端特性
子系统
piezoelectric micropump
terminal behavior
subsystem
