化学气相催化法生长碳纳米管及其器件的原位制备

Latest Progress of in-situ Catalystic Growth of Carbon NanoTubes on Pre-Fabricated Electrodes for Nano-Device Fabrication

本文系统地讨论了化学气相催化法制备碳纳米管的工艺过程。讨论了化学气相催化法原位制备碳纳米管器件的技术 ,即先制备电极和催化剂结构 ,然后在电极上原位生长碳纳米管。与目前通常采用的先制备碳纳米管 ,然后超声分离、沉积 ,再光刻、蒸发制备电极的方法相比 ,该方法可以减少后处理工艺对碳纳米管结构带来的损伤 。

The newly developed technique was discussed in detail,in which nano devices are fabricated by growing carbon nanotube on pre fabricated structures of both electrode and catalyst.In the conventional technique,nano tube devices are usually fabricated with quite a few complicated processes with much technical difficulties,including nanotube growth,ultrasonic separation,deposition on substrates,photolithography and making of metal electrodes.In contrast,the new technique considerably simplifies the fabrication procedures and reduces the possibility of nanotube damages.The potential strengths of the new technique are also tentatively discussed.