摘要
近年来国际上出现的一些新型MEMS光开关,包括其结构、驱动方式、规模等。并且通过对基于各种不同工作机理的光开关之间,性能、结构及可实行产业化程度等各方面数据的分析比较,认为MEMS光开关在现代光通讯领域具有较好的应用发展前景。
Some new MEMS optical switches are introduced in detail in this paper include structures,drives and scales. Comparison between MEMS optical switches and other kinds of optical switches is also given in the performance, structure and industrial applications.It can be found that the MEMS optical switches show great potential in modern optical communications.
出处
《电子器件》
CAS
2003年第3期244-247,共4页
Chinese Journal of Electron Devices