期刊文献+

MEMS光开关技术的研究进展 被引量:2

Recent Development of MEMS Optical Switches
下载PDF
导出
摘要 近年来国际上出现的一些新型MEMS光开关,包括其结构、驱动方式、规模等。并且通过对基于各种不同工作机理的光开关之间,性能、结构及可实行产业化程度等各方面数据的分析比较,认为MEMS光开关在现代光通讯领域具有较好的应用发展前景。 Some new MEMS optical switches are introduced in detail in this paper include structures,drives and scales. Comparison between MEMS optical switches and other kinds of optical switches is also given in the performance, structure and industrial applications.It can be found that the MEMS optical switches show great potential in modern optical communications.
作者 葛峻 秦明
出处 《电子器件》 CAS 2003年第3期244-247,共4页 Chinese Journal of Electron Devices
关键词 光开关 光分插复用 光交换 MEMS optical switch OADM optic exchange MEMS
  • 相关文献

参考文献12

  • 1Mohamed H Bourouha, et al. Advances in Optical and Networking: Past, Present. and Future [ J ]. Proceedings IEEE SoutheastCon 2002,405.
  • 2Mart B.J. Diemeer, Polymeric Thermo-optic Space Switches for Optical Communication [ J ]. Optical Materials 1998 (9) :192-200.
  • 3Gregory T. A. Kovacs, Nadim I. Maid, Kurt E. Petersen, Bulk Micromaching of Silicon[J]. Proceedings of the IEEE, 1998,86(8).
  • 4Gonzalez C and Collins S D,Micromachlned 1×n Fiber-Optic Switch[ J] .IEEE Photonics Technology Letters, 1997,9(5).
  • 5Tsukasa Matsuura,Tatsuya Fukami et al. Silicon micro optical switching devicewith an electromagnetically operated cantilever[J] .Sensors and actuators, 2000,83:220- 224.
  • 6Juan W. - H. and Pang S. W., High- Aspect- Ratio Si Vertical Micromirror Arrays for Optical Switching[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1998,7.
  • 7Yeow Tze-wei ,Eddie Law K Land Andrew Goldberg.Mems Optical Switches[J] .IEEE Communications Magzine.
  • 8Liu A Q,Zhang X M et,An optical crossconnect using drawbridge micro mirrors[J] .Sensors and Actuators A,2002, 97- 98:227 - 238.
  • 9Juan W H and Pang S W. Senior Member,ieee, High-Aspect-Ratio Si Vertical Micromirror Arrays for Optical Switching[ J]. Journal of Microelectromechanical System, 1998,7 (2).
  • 10Peter De Dobbelaere, Ken Falta et,OMM inc,Digital Mems for Optical Switching.

同被引文献29

  • 1李志坚.微电子机械系统(MEMS)发展展望[J].电子科技导报,1997(1):2-9. 被引量:18
  • 2ROBERT ELSENPETER, Toby J.Velte .Optical Networking-A Beginner's Guide [M].The McGraw-Hill Companies, 2002.
  • 3王延华.光网络使用指南[M].北京:清华大学出版社,2003..
  • 4Terry S C A. Miniature Silicon Accelerometer with Built in Damping[A].Digest IEEE Solid-state Sensor and Actuator Workshop[C], 1988: 114-116.
  • 5Thompson X V. New Microsystems Application, Fast Growth[EB/OL].Http://www.smalltimes.com,2002-01-20
  • 6Kuehnel, Sherman S. A Surface Micromachined Silicon Accelerometer with onchip Detection Circuitry [J]. Sensors and Actuators, 1994, 45 (1) : 7-16.
  • 7Suchtelen J V .Simulation of Anisotropic Wet Chemical Etching Using a Physical Model[A]. Technical Digest MEMS'99[C], Orlando, FL, 1999: 332-346.
  • 8Guckel H, Christenson T R, Skrobis K J, etal. Design and Testing of Planar Magnetic Micromotors Fabricated by Deep XRay Lithography and Electroplating[A]. Digest of Technical Papers. The 7th International Conference on Solid-State Sensors and Actuators [C] (Transducers '93), 1993.
  • 9Paul G, Gil B. Electrial and Fluidic Packaging of SurfaceMicromachined ElectroMicrofluidic Devices[A]. presented at SPIE Micromachining and Microfabrication Conference[C], San Jose, CA,2000: 338-343.
  • 10Elwell J M. Inertial Sensor for Commercial and Military Applications[J].Institute of Navigation, 1993(4):380-385.

引证文献2

二级引证文献11

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部