类金刚石碳膜的结构及其微动磨损行为

Microstructure and Fretting of Diamond-Like Carbon\|Based Multilayer Coating

采用非平衡磁控溅射与等离子源离子注入(PSII)的混合技术,在1Cr18Ni9Ti不锈钢上制备N/Ti,N/TiN/C/DLC多层膜,研究其结构和微动磨损性能,并与N注入层比较。结果表明,N注入层内形成了CrN和Fe3N等氮化物相;多层膜内形成了TiN,Ti2N和CrN等化合物相。PSII技术能够提高1Cr18Ni9Ti不锈钢的表面硬度,N注入层的硬度约为基体硬度的2.5倍,DLC多层膜的硬度约为基体硬度的4倍。N注入层和DLC多层膜都能够提高1Cr18Ni9Ti的抗微动磨损性,虽然DLC多层膜比N注入层薄,但其抗微动磨损性能更好。

A diamondlike carbonbased multiplayer coating was prepared on the 1Cr18Ni9Ti stainless steel by hybrid technique of unbalanced magnetic sputtering and plasma source ion implantation (PSII). The structure and fretting behavior of DLCbased multilayer was investigated with compare of the nitrogenimplanted layer. The results showed that some nitride such as CrN and Fe3N were formed on the nitrogenimplanted layer, and some compound such as TiN, Ti2N and CrN were in multilayer coating. Hardness measurement showed that the surface hardness of 1Cr18Ni9Ti stainless steel increased one and half times of metal matrix after nitrogen implantation and four times with the DLCbased multilayer coating. Fretting performance revealed that the fretting wear resistance of stainless steel increased after PSII treatment. Moreover the asprepared DLCbased multilayer coating exhibited better fretting resistance than the Nimplanted layer, which was mainly attributed to the high hardness and the low friction coefficient of the outer DLC film.