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PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM 被引量：1

PREPARATION AND CHARACTERIZATION OF POLY-CRYSTALLINE SILICON THIN FILM
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摘要 Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells. In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film, is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6.05% without anti-reflection coating. Poly-crystalline silicon thin film has big potential of reducing the cost of solar cells. In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalline thin film, is discussed. On the film we developed poly-crystalline silicon thin film solar cells with efficiency up to 6.05% without anti-reflection coating.
作者 Y.F.Hu H.Shen Z.Y.Liu L.S.Wen
机构地区 CollegeofMechanicalEngineering GuangzhouInstituteofEnergyConversion
出处 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2003年第4期309-312,共4页 金属学报（英文版）
基金 This work was supported by the Chinese Academy of Sciences within the Hundred Talent Project(No.99-019-422288) National High Technical Research and Development Programme of China(No.2001AA513060).
关键词 poly-crystalline silicon thin film RTCVD (rapid thermal chem- ical vapor deposition) SSP (silicon sheet from powder) poly-crystalline silicon thin film, RTCVD (rapid thermal chem- ical vapor deposition), SSP (silicon sheet from powder)
分类号 TN304.055 [电子电信—物理电子学]
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参考文献6

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  • 2W. Zimmermann, S. Bau, F. Haas, K. Schmidt and A. Eyer, in: 2nd World Conference and Exhibition on Photovoltaic Solar Energy Conversion, eds. J. Schmid, H.A. Ossenbrink, P. Helm, H. Ehmann and E.D. Dunlop (European Commission, Vienna, Austria, 6-10 July, 1998) p.1790.
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同被引文献9

  • 1胡芸菲,沈辉,王磊,邹禧武,班群,梁宗存,刘正义,闻立时.用区熔技术改善多晶硅薄膜颗粒硅带衬底的质量[J].华南理工大学学报（自然科学版）,2005,33(7):28-31. 被引量：1
  • 2Morikawa H,Nishimoto Y,Naomoto H,et al.16.0% efficiency of large area(10 cm×10 cm)thin film polycrystalline silicon solar cell[J].Solar Energy Materials and Solar Cells,1998,53:23-28.
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  • 4Acim Eyer,Fridolin Haaas,Thomas Kieliba,et al.Crystalline silicon thin-illm(CSiTF)solar cells on SSP and on ceramic substrates[J].Journal of Crystal Growth,2001,225:340-347.
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  • 6Frank R Failer.Epitaxial silicon thin-film solar cells[D].Freiburg,Germany:Albert-Ludwigs-University,1998:56-72.
  • 7Kakinuma H,Mohri M,Sakamoto M,et al.Structure properties of polycrystalline silicon films prepared at low temperature by plasma chemical vapor deposition[J].Journal of applied physics,1991,70(12):7374-7381.
  • 8Anna Selvan J A,Grntzmacher D,Kummer M,et al.Development of Si films by new methods of DC PECVD techniques for film solar cell applications[C]∥16 th European Photovoltaic Solar Energy Conference.Glasgow,UK:James & James(Science Publishers)Ltd.Press,2000.
  • 9王阳元,T.I.卡明斯,赵宝瑛,等.多晶硅薄膜及其在集成电路中的应用[M].第二版.北京:科学出版社,2000.

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Acta Metallurgica Sinica(English Letters)
2003年 第4期

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