规整膜系层厚允许误差的研究

The Study of the Optical-thickness Tolerance of Quarter-Films

提出了一种通过计算机模拟薄膜的淀积过程来计算规整膜系层厚允许误差的方法 ,所计算的层厚允许误差不仅取决于膜系的设计结构 ,还与薄膜的淀积工艺、镀膜设备的监控精度有关 实验结果表明

A new method for estimating the optical thickness tolerance of each layer of a quarter stack has been proposed in this paper. The calculation is based on the computer simulation of optical coating deposition. The calculated result is not only determined by the design structure of the film, but also determined by the depositing approach and the monitoring precision of the thin film coating plant. So the optical thickness tolerance calculated by this method is of directive significance in the practical depositing process for a quarter film system, which is confirmed by experimental results.