平面磁控阴极用于PEPC等离子体放电实验研究

Research on the discharge of planar magnetron cathode in PEPC

平面磁控阴极用于大面积等离子体放电具有大幅降低放电电压和放电气压的优点 ,是PEPC首选的放电途径。通过对不同尺寸、不同磁场强度和不同气压状态下放电实验研究表明 :在较宽的磁场强度范围内都可实现全口径的均匀等离子体放电 ,电极几何尺寸的小量变化对放电均匀性的影响不大。给出了满足 30 0 mm× 30 0 mm放电腔的放电参数。

It has the advantages of largely decrease the discharging parameters of PEPC through magnetron cathode. The resul ts of experiments which in different size of cathode, different strength of magn etic and different gas pressure indicate that the uniform discharge can be got i n a large range of magnetic strength. The small change of the sizes of cathode h ardly effects the parameters and uniformity of discharge. The best parameters of glow discharge for 300mm×300mm discharging chamber is given out.