阳极化膜用于等离子体电光开关放电腔绝缘模拟研究

Study on the isolation technology of metal shell plasma electrode pockels cell

壳体金属化是等离子体电光开关实现阵列结构的必须 ,放电腔的绝缘是壳体金属化的技术关键和难点。分析了等离子体电极电光开关放电腔的主要放电过程和特性 ;介绍了几种厚度阳极化膜层的击穿电压和用于电光开关放电腔绝缘模拟实验的情况和结果。初步分析了影响阳极化膜用于等离子体电极电光开关放电腔绝缘的主要因素 ,实验表明 60 μm厚度的阳极化膜可以满足电光开关放电腔绝缘的实用要求。

The isolate o f discharge chamber is a key issue of metal material shell PEPC. We have constructed the testing fac ilities for breakthrough and modulating discharge respectively. Testing samples of anodized film include three kinds of thickness which are 30μm、60μm and 100 μm respectively. Experiments and theoretical analysis display that the breakdow n threshold of the film depends mainly on the thickness of non-hole layer, and the basic thickness for the isolating of PEPC's glow discharge chamber is 60μm .