氧化铟锡薄膜在光学太阳反射镜上的应用

Application of Indium Tin Oxide Film to Optical Solar Reflector

研究了光学太阳反射镜抗静电放电用氧化铟锡薄膜的设计原则 .理论分析和实验结果表明 ,在将氧化铟锡 (ITO)薄膜应用于光学太阳反射镜 (OSR)表面防静电放电时 ,ITO薄膜的表面方阻R□ 不能小于 5kΩ·□ - 1,否则会导致OSR的太阳光谱吸收率增加 .建议取R□ =5～ 10 6 kΩ·□ - 1,薄膜厚度d =(15 0～ 2 0 0 )× 10 - 10 m .同时必须保证ITO薄膜接地效果良好 ,否则会使OSR表面充放电现象更加严重 .

The design principles of indium tin oxide film(ITO) to prevent lectrostatic discharge for optical solar reflector(OSR) are studied. The theory analysis and experiment results show that two design principles are considered when ITO film is used to prevent lectrostatic discharge for OSR.One of them is that surface square resis- tance R □ of ITO film can’t be less than 5 kΩ·□ -1 ,otherwise, the sun spectrum absorptivity of OSR would increase,and surface square resistance R □ of 5～10 6 kΩ·□ -1 and film thickness d of (150～200)×10 -10 m are recommended. The another is that ITO film must be well grounded, or else the surface charge and discharge phenomena of OSR would be much more serious.