摘要
概述了微机电系统CAD的研究进展,重点介绍了国外在该领域的研究工作。针对其与传统机电系统的不同,总结了微机电系统CAD的技术特点,并据此提出了微机电系统的设计原则,还介绍了微机电系统CAD的系统模型、常用的软件设计方法以及目前存在的几个问题。
The progresses in the research on the CAD for MEMS are described in this pap er,with emphasis laid on the re-search work done abroad in this field.In light of the differences between MEMS and the conventional electrome chanical system,the technical characteristics of th e CAD for MEMS are enumerated and here by the design principles of MEMS are p ut forward,the system model of the CAD for MEMS is presented,and the common methods of software design and several problem s existing at present are described.
出处
《机械制造》
北大核心
2003年第9期7-10,共4页
Machinery
基金
国家自然科学基金资助项目(编号:50275071)
