摘要
介绍了高速压电倾斜镜的结构和工作原理,根据拉格朗日方程建立了高速压电倾斜镜转动的运动微分方程,推导了其固有频率的解析式,并以有限元模型与实测结果作了比较,证明所推导的理论模型是可信的,它对高速压电倾斜镜的结构设计具有指导意义。
In this paper the construction and the operating principle of the fast piezo steering mirror are introduced, and the differential equation of the tilting motion is established according to the Lagrange's equation, the formula of the natural frequency is derived. The model analysis of the fast steering mirror is also carried out with the help of limited element analysis. The theoretic result fits with the result of experiment. The model results can be provided for the construction design of the fast steering mirror.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2003年第10期966-968,共3页
High Power Laser and Particle Beams
基金
国家863计划项目资助课题
关键词
高速压电倾斜反射镜
压电驱动器
动态分析
Fast piezo steering mirror
Piezoelectric actuator
Dynamic analysis