摘要
铁电钛酸锶钡(BaxSr1-xTiO3)是一种拥有十分优越铁电/介电性能的材料,在可调谐微波器件及动态存储器件方面具有很好的应用前景.本文概括介绍了BaxSr1-xTiO3薄膜的研究意义、基本结构、制备方法、各种性能特征及其表征方法与应用展望;并对当前BaxSr1-xTiO3薄膜研究中的几个重要前沿问题进行了详细讨论.
Ferroelectric (Ba,Sr)TiO3 thin films have excellent ferroelectric/dielectric properties, and promising application prospect in tunable microwave devices and dynamic random access devices. In this article, their research backgrounds, basic structures, preparation methods, various characterizations of thin film properties, and applications are summarized. Furthermore, the several important problems of the current researches of (Ba,Sr)TiO3 thin films are also discussed in great detail based on the acquired research results.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第5期989-997,共9页
Journal of Inorganic Materials
基金
国家自然科学基金(59832050)
国家重点基础研究(G1999064604)
关键词
铁电/介电薄膜
钛酸锶钡
微波器件
动态随机存储器
ferroelectric/dielectric thin film
barium strontium titanate (BST-x)
microwave devices
dynamic random access device
