基于斜拉涂胶法光学胶膜厚度的精确模型

Study on Thickness of the Photoresist Film in Incline-dip Coating

提出一种斜拉涂胶法。此方法增加了角度控制因子,使得胶膜的厚度更易控制。采用流体力学理论对斜拉涂胶的力学机理进行分析,建立定常流动条件下和非定常流动条件下,斜拉涂胶的数学模型,最终得到胶膜厚度与胶液粘度、斜拉角度、斜拉速度和胶液粘度变化规律之间的精确表达式。

The inclinedip coating was proposed.The new coating method add a angle factor to make the controllable of the thickness of film well.Dynamic process of inclinedip coating was analyzed using fluid dynamic theory.Not only when the viscosity of photoresist liquid is constant,the mathematic model of thickness,angle,speed and viscosity is set up,but also when the viscosity is changeable at coating process,the mathematic model is set up.