激光多普勒效应回转体表面轮廓测量系统

A Profile Measuring System of Rotation Body Using Laser Doppler Effect

提出一种基于激光多普勒效应的回转体表面轮廓测量系统。散射光的多普勒信号强度、信噪比是测量的重要参量,为此研究了多普勒差动方法、锁相环(PLL)频率跟踪器等技术,设计出差动纵向多普勒光路、频率跟踪特性良好的锁相环电路、精密旋转进给系统。实现了测量分辨率10μm,最大相对误差1.0%。

A new type of rotation body profile measuring system utilizing laser Doppler effect was proposed.The intensities of Doppler signal of scattering light and SNR are the important parameters to the measuring system.A differential optical measuring system,PLL with best performance of frequency tracing,and precision rotating feed system were designed.based on Doppler differential method and phase lock loop frequency tracker.The resolution of 10 μm is accomplished with the maximal relative error of 1.0 %.