摘要
讨论了纳米加工与常规精加工的区别,介绍了纳米加工的关键技术及其在微型机械和微型机电系统的应用.
The nanotechnology is an emerging scientific technology. The differences between nanometer scale machining and traditional precise working are discussed in the paper. It also presents the key technology in nanometer scale machining and the application in micromachine and MEMS.
出处
《河北建筑工程学院学报》
CAS
2003年第3期47-50,共4页
Journal of Hebei Institute of Architecture and Civil Engineering
