离轴照明空间成像的偏振光影响研究

An Investigation on Effect of the Polarized Light in the Off-axis Illumination Aerial Images

在投影光刻中矢量衍射理论适用于研究照明光的偏振态对空间成像的影响。主要研究了在离轴照明方式下照明光的偏振态对线条图形的影响。发现在高数值孔径时光的偏振状态严重影响了离轴照明空间成像,结果表明可以通过控制照明光的偏振态来改善光学系统的分辨率。

Vector diffraction theory is applied for the investigation of the effects of the polarization state of the illumination light on the aerial images in the optical lithography. The effects of the polarization state of the illumination light for the line/space patterns in the offaxis illumination are studied. It is found that aerial images in the off-axis illumination are badly affected by the polarization state of light in the high NA. This result suggests that it is possible to improve the resolution of an optical system by controlling the polarization state of illumination light.