大位移自对准光开关微动作器的模拟和制作

Simulation and fabrication of larger displacement self-aligned optical switch actuator

报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。模拟结果表明,该微动作器的第一模态频率远低于第二模态,镜子的位移由梁的扭转引起。在32.8V的电压驱动下,上电极的前端位移是69.6μm,镜子的有效位移是57μm。测到第一模态频率是500Hz。利用本结构可成功地解决开关速度和大位移的矛盾。这样的位移足够使用Corning OptiFocus Collimating Lensed Fiber来对准,从而获得低插入损耗。

A novel micromachining torsion beam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM). The simulation shows that the first mode frequency for performance is near 1000Hz, which is much lower than that of the second mode. The displacement of mirror is caused by the torsion of beam. The switch was fabricated utilizing silicon micromachining technology. The results show that the effective displacement of the reflective mirror is 57μ m which is enough for the application to the new Corning OptiFocus Collimating Lensed Fiber while the driven voltage is 32.8V; the first mode frequency of the switch is 500Hz. The confliction between low driving voltage, larger displacement and suitable first mode frequency can be solved successfully by using such structure.