摘要
氧化铟作为一种比较新的气敏材料,在一定程度上解决了现有气体传感器中存在的选择性差和工作温度高等问题.近几年来大量的文献报道了氧化铟传感器检测O_3、 CO、 NO_2等气体.本文按照被检测气体的种类,从In_2O_3的气敏材料制备及气敏性能两方面对现有In_2O_3气体传感器进行了论述,并指出了In_2O_3半导体气体传感器的发展方向.
Since the birth of new gas-sensitive material of indium oxide, poor selectivity and high operating temperature in existing gas sensors have been solved to some extent. In recent years, indium oxide sensors detect gases such as O3,CO,and NO2 have been reported in a large number of literatures. Based on the type of gas to be tested, we discuss about the preparation and properties of In2O3 gas sensor,and then the development direction of In2O3 semiconductor gas sensor is pointed out.
作者
臧传伟
郭雨
唐伟
杜学舰
修显武
Zang Chuanwei;Guo Yu;Tang Wei;Du Xuejian;Xiu Xianwu(School of Physics and Electronics,Shandong Normal University,Shandong Key Laboratory of Optical and Photonic Devices,250358,Jinan,China;School of Physics and Electronics,Shandong Normal University,Shandong Key Laboratory of Optical and Photonic Devices,250358,Jinan,China)
出处
《山东师范大学学报（自然科学版）》
CAS
2019年第1期84-87,共4页
Journal of Shandong Normal University(Natural Science)
关键词
氧化铟
气敏材料
气体传感器
indium oxide
gas sensing materials
gas sensor
