石英晶体多路微天平等效电路和相关实验研究

Experimental Study of Multichannel Quartz Cystal Microbalance Equivalent Circuit

从AT切的石英晶体等效电路出发,利用电路理论推导单片石英晶体上耦合电极的相互影响.相互耦合作用用复电阻描述,然后通过实验观察复电阻的频率特性,分析其具体的形式.同时通过实验初步观察了MQCM(multi-channelquartzcrystalmicrobalance)对石英片谐振频率的影响,以及不同电极尺寸对耦合的影响.

Educing the interrelationship of coupling electrode of singleleaf quartz crystal from the equivalent circuit of ATcut quartz crystal, using the circuit theory, is presented. The coupling interaction is described by complex electric resistance. To observe the frequency property of complex electric resistance and then analyse it′s specific format by experiments. At the same time we observe the influence of MQCM to quartz crystal harmonic frequency and the influence of the size of electrode to the coupling by experiment.