铜基体上类石墨膜结合强度评价及其与干摩擦性能关系

Evaluation of Bonding Strength of Graphite Like Films on Copper Substrate and Its Relationship with Dry Friction Properties

用非平衡磁控溅射离子镀技术在铜合金上制备了不同Ti含量的类石墨碳膜,用维氏压入、洛氏压入、划痕等方法测试薄膜的附着性能,用高速线性往复磨损实验机检测薄膜的干磨性能,并用光学显微镜、白光干涉仪观察磨痕。结果表明:压痕法更适合评价软基体上硬膜的结合强度,且维氏压入法因加载载荷较小,基体塑性变形小,评定的结合强度与干摩擦磨损时膜基体系的耐磨性具有对应关系。当靶电流为0.2 A时,铜合金上的类石墨膜与对磨球的摩擦系数和磨损率达最小值,分别为0.14和2.89×10^(-16)m^3/(N·m)。划痕法不适合用来快速评定和预测软基硬膜体系的结合强度。载荷较小的维氏压入法具有更好的结合强度鉴别区分度。

Graphite like carbon films with different Ti content were prepared on the copper alloy by unbalanced magnetron sputtering ion plating.The Vivtorinox press,Rockwell pressing,scratching were used to evaluate the adhesion.The dry tribological behaviors were characterized by high-speed linear reciprocating wear testing machine.The wear scar was observed by optical microscopy and white light interferometer.The results show that the indentation test method is more suitable for the adhesion test of hard film on soft substrate.The adhesion tested by Vickers indentation has a higher corresponding relationship with the wear resistance of the membrane based system because of the smaller load and the smaller plastic deformation of matrix.The graphite-like carbon film on the copper alloy can reduce the friction coefficient and wear rate,acquiring the minimum value of 0.14 and 2.89×10-16m3/N·m,respectively,when the Ti target current is 0.2 A.The scratch test is not suitable for rapid evaluation and prediction of the bonding strength of soft soil dura mater system.The Vivtorinox compression method with smaller load has a better identification degree of adhesion.