微扰法测量介质陶瓷薄膜的介电特性

Cavity Perturbation Method for Measurement of Complex Permittivity of Dielectric Ceramic thin Film

对于介质陶瓷薄膜 ,特别是厚度小于 1μm的介质陶瓷薄膜 ,我们提出了一种新的基于微扰理论的测量方法 ,本文对该方案进行了理论推导 ,获得了计算介质陶瓷薄膜复介电常数和Qf的公式 ,并设计了实际的测试方案 ,以具体的介质陶瓷薄膜作了测试验证和误差分析。结果表明 ,该方案是可行的 ,测量结果具有较高的精度 ( 7% ) 。

In this paper, a new method is presented, which is available for determining the complex permittivity ε and Qf of dielectric thin film, whose thickness is less than 1μm. The method is based on cavity perturbation theory and has been specially modified for thin film measurement. Experiment results show that the measurement's precision is good and could be improved by taking some modification , which will be present at the end of this article.