摘要
系统地分析了靶球真空吸附装置中靶球受力状况 ,介绍了一种简单有效地确定靶球真空吸取力的计算方法 ,通过强度校核的方法 ,得到合理的吸取力参数范围 ;并分析了吸取力对靶球位置精度的影响。
The vacuum adsorption force acting on the target sphere is analysed completely. An effective and simple method is introduced to calculate adsorption force of target sphere. Using the method of checking strength, we obtain the rational parameter range about adsorption force and analysis the influence of adsorption force on target orientation accuracy. The designing rationality is testified during the actual utilization.
出处
《真空》
CAS
北大核心
2003年第5期24-27,共4页
Vacuum