摘要
通过一系列实验测试了致密型高纯氧化铝陶瓷 (99瓷 )的出气速率 ,考察了材质、不同预处理方法等因素对其出气性能的影响 。
The results of the experiments and calculation of the outgassing rate for the 99% alumina ceramic are shown. The influence of the ceramic components, pretreatment on outgassing is observed. The outgases and their proportions are analyzed through a series of experiments.
出处
《真空》
CAS
北大核心
2003年第5期37-40,共4页
Vacuum