摘要
研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施,利用双光束激发制备得到了超微的、非晶纳米氮化硅粉体。实验证明,纳米氮化硅粉体具有很多奇异物理性能和光谱特性。
The general principles of LICVD(laser induced chemical vapor deposition)are investigated and the measures to reducing dissociated Si are put forward.By applying double beam optical stimulation,the ultrafine and amorphous Si3N4 nanopowders which possesses many peculiar physical chrarcteristics as well as optical features are obtained.
出处
《中国粉体技术》
CAS
2003年第4期35-38,共4页
China Powder Science and Technology
关键词
激光诱导化学气相沉积法
氮化硅
纳米粉体
红外吸收光谱
拉曼光谱
laser induced chemical vapor deposition
silicon nitride
nano-powders
infrared absorption spectra
Raman spectra