激光诱导化学气相沉积法制备纳米氮化硅及粉体光谱特性研究

Research on Preparation of Silicon Nitride Nano-powders with Laser Induced Chemical Vapor Deposition and Optical Characteristics of Powders

研究了激光诱导化学气相沉积法制备纳米氮化硅的工作原理,提出了减少游离硅的措施,利用双光束激发制备得到了超微的、非晶纳米氮化硅粉体。实验证明,纳米氮化硅粉体具有很多奇异物理性能和光谱特性。

The general principles of LICVD(laser induced chemical vapor deposition)are investigated and the measures to reducing dissociated Si are put forward.By applying double beam optical stimulation,the ultrafine and amorphous Si3N4 nanopowders which possesses many peculiar physical chrarcteristics as well as optical features are obtained.