摘要
针对应变片在圆平薄膜上的两种布置方式 ,导出圆平薄膜压力传感器灵敏度的计算公式 ,分析应变片布置方式和位置以及温度对灵敏度的影响 ,通过理论计算与实际测量结果比较 ,指出提高压力传感器灵敏度的有效途径为采用轻掺杂的应变电阻。分析应变片 2种布置方式压力传感器灵敏度与温度的关系。
On the basis of the two basic arrangements of stain resistance on the round and flat diaphragm, the calculating formulas of thin film pressure sensor sensitivity were introduced. By analyzing the effects of the location and arrangements of stain resistance on pressure sensor sensitivity and the relation between environmental temperatures and its sensitivity, a new way of improving pressure sensor sensitivity, which is made by strain resistance, has been acquired based on theoretical calculation and experiment tests.
出处
《铸造技术》
CAS
北大核心
2003年第5期401-402,共2页
Foundry Technology
