摘要
从模具材料研究模具制作工艺问题,通过实验研究,对比分析了有机玻璃模具和硅橡胶模具制作工艺。实验表明,可以复制出特征尺寸为0.35μm和0.1μm的有机玻璃模具和硅橡胶模具,均具有很高的复型精度。由于硅橡胶模具制作工艺在复型精度、复型精度稳定性和制作速度上均优于有机玻璃模具,且缺陷密度低于有机玻璃模具。因此,选用基于高复型精度软硅橡胶模具的软压印光刻工艺。
The fabrication processes of silicone- rubber mold and polymethyl methacrylate (PMMA) mold have been compared and analyzed.The experimental results display that the mold whose critical dimension is 0.35μm or 0.1μm can be replicated and the replication accuracy is very high.Compared with the fabrication process of PMMA mold,the silicone-rubber mold has higher replication accuracy,higher fabrication speed and lower defect density.As a result,the fabrication process of silicone-rubber mold is adopted and hence the so-called soft imprint lithography is realized.
出处
《电子工艺技术》
2003年第5期207-209,共3页
Electronics Process Technology
基金
国家自然科学基金资助项目(50275118)
国家863计划重点项目(2002AA420050)。
关键词
压印光刻
硅橡胶
有机玻璃
模具
复型
Imprint lithography
Silicone-rubber
PMMA
Mold
Replication
