时间监控法制备窄带滤光膜系工艺技术

Technology of narrow bandpass interference filter by time monitoring method

基于规整全介质窄带滤光膜系初始结构,采用光学薄膜软件中单纯形算法优化出了所需光谱特性曲线,并对制备结果进行了拟合反演,依靠时间监控的离子束溅射镀膜机制备了中心波长950±2 nm,半宽度50 nm,峰值透过率大于90%,截止透射率小于0. 5%的窄带滤光膜系。

Based on the initial structure of narrow band filters,the spectral characteristic curves were optimized by simplex algorithm in optical thin film software,and the results were experimented with fitting inversion.By time monitoring method,a narrow band filter system with the central wavelength being 950±2 nm,half wave width being 50 nm,peak transmittance being more than 90%and cut-off transmittance beingless than 0.5%was prepared by the time-monitored ion-beam sputtering coating machine.