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硅酸镓镧单晶材料的声表面波标签研究 被引量:2

The study of langasite based surface acoustic wave tag
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摘要 声表面波射频识别标签在射频标签领域获得广泛关注,其中对标签基底材料的研究也成了研究热点。文章旨在研究使用硅酸镓镧单晶材料为压电基底的声表面波标签的标签特性。对使用硅酸镓镧单晶材料为压电基底的声表面波标签进行频域和时域分析,并结合有限元分析方法,对标签的特征频率、叉指换能器(Interdigital Transducer, IDT)的反射系数、叉指电极金属化比、金属电极厚度以及标签回波特性进行研究分析,提取了耦合模COM(Coupled-mode)模型参数。分析结果表明了压电效应是声表面波的谐振与反谐振频率存在的根源,验证了脉冲幅度编码方式,并为使用硅酸镓镧材料作为压电基底的声表面波标签的制作提供了仿真实验依据。 Surface acoustic wave(SAW)radio frequency identification tags have attracted widely attention in the field of radio frequency tags,and the study of the tag substrate materials also becomes a hotspot.The purpose of this paper is to study the tag properties of surface acoustic wave tags using langasite(LGS)as piezoelectric substrate.The surface acoustic wave tag based on LGS(0°,138.5°,26.7°)is analyzed in frequency domain and time domain.The tag characteristic frequency,deposit ratio of interdigital electrode,metal electrode thickness and echo pulse characteristics are analyzed by the finite element analysis method.The analysis results show that the resonance and anti-resonance frequencies of surface acoustic wave are caused by the piezoelectric effect,and the pulse amplitude encoding mode is also verified.These results provide a basis for the fabrication of surface acoustic wave tags.
作者 徐梦茹 肖夏 XU Meng-ru;XIAO Xia(School of Microelectronics Tianjin University,Tianjin 300072,China)
出处 《声学技术》 CSCD 北大核心 2019年第1期108-112,共5页 Technical Acoustics
基金 国家自然科学基金资助项目(61571319)
关键词 声表面波标签 硅酸镓镧单晶 有限元方法 surface acoustic wave tag langasite finite element simulation
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