日盲型MgZnO紫外光传感器研制及性能分析

Preparation and performance analysis of solar-blind MgZnO ultraviolet sensor

紫外探测虚警率低,不受热噪声影响,可以与红外探测及雷达探测相结合,在火力探测及预警领域有广阔的应用前景。该文采用分子束外延法,通过控制Mg源、Zn源和蓝宝石衬底的温度变化,制备一种MgZnO日盲型紫外探测传感器。对其紫外光谱透光率、响应率和响应时间进行测量。在实验室内利用氘灯作为紫外光源,对MgZnO紫外探测传感器进行探测实验,得到响应电压和日盲波段响应率。通过进一步优化探测器制备工艺,提高探测器响应面积和响应率,有望实现远距离的火力探测和预警。

Ultraviolet detection had a broad application prospect of fire detection and warning。Ultraviolet detection had low false rate and nor heatednoise influence, it can be combined with infrared detection and radar detection. With the development of new materials and techniques, the military application of ultraviolet detection will be more widely. Using molecular beam epitaxy prepared a MgZnO ultraviolet detection sensor by controling the temperature of Mg source, Zn source and the sapphire substrate. It's ultraviolet spectrum light transmittance, response rate and response time was measured. Using deuterium lamp as a ultraviolet light source, detection experiment for MgZnO ultraviolet detection sensor was carried out, the response voltage and solar blind wave band response rate was measured. It's expected to achieve long-range fire detection and warning, by optimizing the preparation technology and improving the response area and rate of the MgZnO ultraviolet detection sensor.