位置误差对叉指状微小力装置力学特性影响分析

Effects of position errors on mechanical characteristics of inter-digital micro force devices

为确定基于静电力原理微小力装置位置误差对输出结果影响,采用有限元分析方法对一种新型叉指状微小力装置位置变化时输出微小力特性进行分析。通过比较装置极板位置在X、Y、Z方向6个自由度上发生独立运动及复合运动时装置输出微小力变化规律,探讨装置位置误差对叉指状微小力装置力学特性影响;并确定各自由度上装置位置误差对输出微小力影响较小区间。结果表明不同自由度上叉指状装置位置误差对装置输出结果影响程度不同;位置误差控制在一定范围内,对装置输出微小力影响较小,可为简化电容式微小力源装置设计与制造提供理论依据。

To determine the effects of position errors of inter-digital micro-force devices on output results, the mechanical characteristics of a new inter-digital capacitor micro force device were analyzed by finite element method. The varying patterns of the output micro forces of the device was discussed when the polar plate of the device moved independently and compositely on the six free degrees in X,Y,Z directions,then the position error could be found. The small influence area of position error is determined on each of the aforementioned degree of freedom; it is comparatively small when the position error is controlled within a certain range. The results have served as a theoretical basis for the design and manufacturing of simplified capacitor micro-force devices.