双光学灵敏杠杆法内径尺寸测量原理的研究

The measuring principle of inner diameter with double optical lever method

针对高效便捷精确测量内径尺寸的问题,该文提出双光杠杆法测量内径尺寸原理,采用两块反射镜形成双光学灵敏杠杆的方法,通过CCD相机采集移动的衍射光斑图像,实现将测头的移动转换为CCD相机上光斑的移动,从而测得内径尺寸。结合反射定律,通过解析几何的办法建立双光学灵敏杠杆法测量内径尺寸的数学模型,并计算两反射镜小角度旋转的21×21种组合情况下内径尺寸的计算结果。根据所建立模型计算设计测头A、测头B分辨力为0.1μm,可较好地满足微米级的测量需求。该原理性研究为双光杆法内径尺寸测量装置的研制提供理论基础。

Aiming at the problem of efficiently and accurately measuring the inner diameter, this paper, based on the principle of optical lever amplification, uses two mirrors to form a double optical sensitive lever. The CCD camera picks up the laser diffraction spot image, and translates the movement of the probe to the movement of the spot on the CCD camera, which can be measured inside diameter size. Combining with the law of reflection, a mathematical model of double optical sensitive lever amplification was obtained by analyzing the geometry, and the inner diameter of the bearing under 21×21 combinations of two mirrors rotating at a small angle was calculated. According to the established model, the design probe A and probe B have a resolution of 0.1 μm, which can meet the measurement requirement of micrometer well. This research of principle provides a theoretical basis for the development of the device for diameter measurement which with double optical lever method.