期刊文献+

双光学灵敏杠杆法内径尺寸测量原理的研究 被引量:1

The measuring principle of inner diameter with double optical lever method
下载PDF
导出
摘要 针对高效便捷精确测量内径尺寸的问题,该文提出双光杠杆法测量内径尺寸原理,采用两块反射镜形成双光学灵敏杠杆的方法,通过CCD相机采集移动的衍射光斑图像,实现将测头的移动转换为CCD相机上光斑的移动,从而测得内径尺寸。结合反射定律,通过解析几何的办法建立双光学灵敏杠杆法测量内径尺寸的数学模型,并计算两反射镜小角度旋转的21×21种组合情况下内径尺寸的计算结果。根据所建立模型计算设计测头A、测头B分辨力为0.1μm,可较好地满足微米级的测量需求。该原理性研究为双光杆法内径尺寸测量装置的研制提供理论基础。 Aiming at the problem of efficiently and accurately measuring the inner diameter, this paper, based on the principle of optical lever amplification, uses two mirrors to form a double optical sensitive lever. The CCD camera picks up the laser diffraction spot image, and translates the movement of the probe to the movement of the spot on the CCD camera, which can be measured inside diameter size. Combining with the law of reflection, a mathematical model of double optical sensitive lever amplification was obtained by analyzing the geometry, and the inner diameter of the bearing under 21×21 combinations of two mirrors rotating at a small angle was calculated. According to the established model, the design probe A and probe B have a resolution of 0.1 μm, which can meet the measurement requirement of micrometer well. This research of principle provides a theoretical basis for the development of the device for diameter measurement which with double optical lever method.
作者 刘林青 李东升 马建东 秦昀亮 LIU Linqing;LI Dongsheng;MA JiANDong;QIN Yunliang(College of Metrology Technology and Engineering,China Jiliang University,Hangzhou 310018,China;Technical Monitoring Center,Changqing Oil Field Branch Company,Xi'an 710021,China)
出处 《中国测试》 CAS 北大核心 2019年第2期16-21,共6页 China Measurement & Test
基金 国家自然科学基金项目(51775529)
关键词 双光学灵敏杠杆 内径尺寸检测 小孔衍射 亚像素法 double optical lever inner diameter measurement pinhole diffraction subpixel method
  • 相关文献

参考文献9

二级参考文献51

  • 1潘在友,刘惠兰,冯丽爽,邢济武.基于光杠杆原理测量压电陶瓷压电特性的方法[J].红外与激光工程,2008,37(S1):196-199. 被引量:5
  • 2葛继.基于LOG-Zernike算子的快速图像测量[J].光电工程,2007,34(3):63-67. 被引量:6
  • 3张蓓,宋西平.利用光杠杆法测量金属丝的弹性滞后环[J].大学物理,2007,26(3):38-40. 被引量:5
  • 4张英会.弹簧手册[M].北京:机械工业出版社,2008.
  • 5YODER P R Jr.光机系统设计[M].周海宪,程云芳,译.3版.北京:机械工业出版社,2008.
  • 6SEBASTIAN R.Successful positioning requires an understanding of positioner limitations,along with the requirements and constraints of the application[J/OL].Oemagazine,2004-04-31[2010-03-15].http://spie.org/x17134.xml? Article ID=x17134.
  • 7Canny J. A computional approach to edge detection [J]. IEEE Trans. on PAMI,1986,8(6) :679-698.
  • 8Karrakchou M,Wei L. Optimal ramp edge detection by orthogonal wavelet transform [ C ]//Proc. IEEE International Symposium on Circuits and Systems , San Diego : 1992,2 : 967-970.
  • 9Mallat S, Zhong S. Characterization of signals from mutiscale edge[J]. IEEE Trans. on PAMI, 1992, 14 (7) :710-732.
  • 10Stephane Mallat.信号处理的小波导引[M].杨力华,译.北京:机械工业出版社,2005:122-163.

共引文献63

同被引文献18

引证文献1

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部