利用图像拼接实现微结构的大视场测量

Large field of view measurement of microstructure using image stitching

为实现基于图像的飞秒激光烧蚀硅晶片光斑阵列的完整测量,对采集的多幅光斑阵列图像拼接,得到完整的飞秒激光烧蚀光斑阵列图像。首先,对飞秒激光烧蚀光斑图像进行增强处理,对光斑进行方形拟合提取中心点,获取每两个中心点间的像素值,运用线纹对微视觉测量系统标定,获得像素尺寸与几何尺寸之间的比例系数,根据比例系数对像素尺寸与几何尺寸进行换算,得到对光斑阵列的视觉测量值;最后,用拼接后的光斑阵列进行图像测量,得到测量尺寸与实际尺寸间的误差平均值为3.00%。经实验验证,利用图像拼接对微视觉系统大视场微结构进行图像测量是可行的。

In order to realize the complete measurement of the image-based femtosecond laser ablation spot array, the images of the collected multiple speckle array are spliced together to obtain the complete image of femtosecond laser ablation array. First of all, the image of femtosecond laser ablation spot should be enhanced,and the spot should be square fitted to extract the center point, so as to obtain the pixel value between each two center points. With the line pattern to calibrate the micro vision measurement system, the scale factor between the pixel size and the geometric size are obtained, and the pixel size and the geometric size are converted according to the scale factor, obtaining the visual measurement value of spot array. Finally, the average error between the measured dimension and the actual size is 3.00% by using the image measurement of the spliced spot array. It is proved by experiments that it is feasible to measure the microstructure of large field of view in micro vision system by using image stitching.