基于模型识别的高温微型压力传感器

Hige Temperature Pressure Microsensor Based on Model Identification

高温测量是急需解决的测量问题之一。介绍一种将放大电路与信号传感器件分离的基于模型识别技术的高温微型电容式压力传感器。电阻电容信号滤波网络和信号的模型识别组成一个微型传感系统,在对滤波网络进行激励和模型识别后就可以得到变化的电容值。这种MEMS技术制作的硅玻璃键合的电容式压力传感器,可以在小于300℃环境下工作。此高温测量系统既满足高精度测量的要求,也避免了在高温环境中进行信号放大的难题。

Measuring in high temperature is a problem in dire need of sloving.A kind of high temperature capacitive pressure microsensor based on model identification is introduced.The microsensor is made of RC signal filter and signal model identification.Can get a capacitor after inspiring the filter and model identification.It can work in a condition less than 300 ℃ .The high temperature measuring system with high precision avoids the trouble of amplifying signal in high temperature.