摘要
采用传统熔体冷却方法,研究以TiO2为成核剂、以Li2O Al2O3 SiO2为基础组成的玻璃的制备工艺;根据差热分析(DTA)的结果确定玻璃的核化与晶化温度,然后针对基础玻璃组成,采用二步热处理方法获得透明的微晶玻璃;用X射线衍射分析(XRD)和扫描电子显微镜(SEM)对晶化试样的物相和显微结构进行研究;用热膨胀仪测定玻璃在热处理前、后的热膨胀系数;用绝缘电阻测试仪测试该微晶玻璃的电阻率.研究结果表明:微晶玻璃的主晶相为Al2O3·TiO2微晶体,次晶相为ZnSiO3;微晶玻璃与硅片有相近的热膨胀系数,约为32.5×10-7/℃;微晶玻璃晶化后的电阻率较低,为6.8×1010Ω·cm.
The basic glasses of the Li2OAl2O3SiO2 system with TiO2 as nucleation agent were prepared by adopting conventional melt quenching technology, and the temperature of nucleation and crystallization were determined based on results of DTA. Transparent glassceramics were obtained by using twostep heattreatment method with the Li2OAl2O3SiO2 system, which contains main crystal phases Al2O3·TiO2 and minor crystal phases ZnSiO3.The crystalline phases, the microstructures of the glassceramics were investigated by means of the XRD and SEM. The thermal expansion coefficients of the glass before and after it is heattreated were determined, and the resistivity of glassceramics was measured by NF2511A. The results show that the thermal expansion coefficient of the glassceramics clos upon that of silicon is about 32.5×10-7/℃, and resistivity of the glassceramics is 6.8×1010 Ω·cm.
出处
《中南工业大学学报》
CSCD
北大核心
2003年第5期472-475,共4页
Journal of Central South University of Technology(Natural Science)
