摘要
设计研制了一种小体积、低成本、可扩展的低电压非硅基底 1× 4微机电系统光开关。开关单元由电磁驱动 ,微反射镜绕直径 10 0 μm转轴转动 ,驱动电压为 5V ,开关时间小于 2ms,插入损耗小于 0 .84dB ,具有断电自锁功能。器件构造工艺采用微细电火花加工技术。用有限元法分析受力和磁场 ,进行结构优化设计 。
A fiber optic switch based on a novel micro\|electromechanical system (MEMS) technology is developed, allowing fast switch (<2 ms), excellent isolation (>50 dB) and wide bandwidth. Each switch module consists of an electromagnetically actuated gold coated silicon mirror rotating around a 100 μm diameter shaft and a miniature 5 V driven coil. Enabling technology is of precision EDM machining. The switch is scalable to 8×8 and allows the realization of high capacity cross connects.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2003年第9期1041-1044,共4页
Acta Optica Sinica
关键词
微型光机电系统
光开关
有限元分析
微反射镜
光纤通信技术
结构设计
optical fiber communication technology
micro\|optical electromechanical system (MOEMS)
optical switch
electro\|discharge matching (EDM)