低温PVD法制备多组分超硬薄膜相组成研究

Study on the Phase Composition of Multicomponent Superhard Coatings Prepared by PVD at Low Temperature

回顾了多组分硬质薄膜的发展 ,指出了多组分薄膜低温淀积时相组成研究与预测存在的问题。对多组分硬质薄膜 ,包括类质同晶体系与多组分共熔体 ,低共熔体系、转熔体系、亚稳定固熔体与非晶固熔体 ,化合物 ,梯度薄膜 ,多相薄膜材料 ,多层薄膜和超晶格薄膜等可能的相组成与相关性质进行了讨论。对淀积速率与薄膜厚度 ,相组成与薄膜均质性 。

In this paper, the development of multicomponent superhard coatings or films, including multicomponent solid-solution coatings, multilayered coatings, functionally graded coatings, and superlattice films, were reviewed. The problems of studying and predicting the phase compositions of multicomponent superhard coatings prepared at low temperature were indicated.The possible phase compositions and their properties were discussed.The theoretical methods to predict their typical properties for these coatings or films were reviewed.