316L不锈钢表面液相沉积TiO_2薄膜的耐蚀性研究

Corrosion resistance behavior of TiO_2 thin films prepared by LPD on SS316L

采用液相沉积法在316L不锈钢表面制备TiO2薄膜。运用电化学方法对不同时间和不同热处理温度下制备的薄膜在Tyrode′s模拟体液中的腐蚀行为进行了研究。结果表明,随沉积时间的增加,膜层增厚,抗腐蚀性能增强,而且热处理后薄膜的性能更佳。原子力显微镜(AFM)和扫描电子显微镜(SEM)发现膜由均匀的纳米粒子堆积而成,膜层光滑。沉积96h,然后经过500℃、1h热处理后得到的TiO2薄膜的性能最佳。

TiO2 thin films on SS316L were prepared by liquid phase deposition (LPD). Electrochemical techniques were used to study the corrosion resistance behavior of heated or unheated TiO2 thin films attained in different time in Tyrode′s solution. The results proved that the anticorrosion performance with time increasing would be enhanced, and moreover heated thin films had the better anticorrosion performance. AFM and SEM analysis of surface morphology and roughness indicated that all the films were dense, uniform and composed of nanosized particles. The TiO2 thin films prepared in 96h with 500℃,1h heated had good corrosion resistance and could be used as protective layers on SS316L for biomedical application.