三维表面轮廓的测量技术

Measurement Technique for 3D Surface Profile

简要介绍了用于三维表面轮廓测量的接触式和非接触式两种测量方法的优缺点 ,重点阐述了实体光栅法、正弦波相位调制法和白光相移干涉法三种非接触式测量方法的原理。提出了用白光相移干涉法进行三维表面轮廓测量应采用的系统结构和算法。

Merits and demerits of contact-type measurement and non-contact-type measurement used in the measurement of 3D surface profile are briefly introduced. The principle of three non-contact-type measurement methods, including object optical grating method, sine wave phase modulation method and light bulb phase-shift interfering method, is laid special stress to discuss. System structure and algorithm used in the measurement of 3D surface profile are presented while using the light bulb phase-shift interfering method.