摘要
The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine tool spindle with force monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC 22ID machine.
The structure characteristics of ID precision uhrathin monoerystaUine silicon section cutting machine-tool spindle with force-monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal-wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity.According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC-22ID machine.
